Process Specialties has been providing reliable high quality wafer processing services to the Semiconductor, MEMS, Medical and Military/Aerospace industries since 1988.

After 21 years of successfully processing over three million 100 - 200mm wafers, we continue to be a consistent and valuable resource for our client's confidential custom processing needs. Below you will find the normal processing we are offering, we do more processing than what is listed here. Including processing of SOI, quartz, SiGe, as well as other substrates/objects though certain processes. Please call PSI customer service to discuss custom processing.

Processes                                              Specifications                                              Available Size(s)

DRY THERMAL OXIDE

THERMAL OXIDE

POLYSILICON DEPOSITION

LPCVD NITRIDE DEPOSITION

AMORPHOUS SILICON DEPOSITION

POCL3 DOPING OF POLYSILICON

PETEOS OXIDE DEPOSITION

PVD PURE ALUMINUM

PVD ALUMINUM / Cu .5%

PVD TITANIUM (Ti)

PVD TITANIUM NITRIDE (TiN)

PVD TANTALUM (Ta)

PVD TANTALUM NITRIDE (TaN)

PVD COPPER (Cu)

PVD TUNGSTEN (W)

PVD CHROME (Cr)

WET CLEANING

WET PATTERNED ETCHING

PLASMA STRIPPING / ETCHING

WAFER RECYCLING / RECLAIM

PHOTORESIST STRIPPING

PROXIMITY PHOTOLITHOGRAPHY

STEPPED PHOTOLITHOGRAPHY

PHOTORESIST COATING  5K - 30KÅ

40 - 900Å

900 - 24,000Å

1000 - 30,000Å

200 - 3,000Å

200 - 1500Å

12 - 100 OHM/SQ (depending on poly Tx)

500 - 30,000Å

1,000 - 20,000Å

1,000 - 20,000Å

200 - 3,000Å

200 - 3,000Å

200 - 3,000Å

200 - 3,000Å

200 - 15,000Å

200 - 4,000Å

200 - 2,000Å

RCA, SC1 - SC2, Dilute HF/DI cleaning

HF-BOE Oxide, KOH Silicon etching

POLY / NITRIDE  (5um+ Feature Etching)

STRIP FILMS / POLISHING SERVICE

H2SO4 / H202 (PIRANHA), PLASMA

3 MICRON+ PSI or CUSTOMER MASKS

.5 MICRON+ PSI or CUSTOMER RETICLES

I LINE / G LINE / DUV 248 nm 

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

75, 100, 125, 150 & 200mm

75, 100, 125, 150 & 200mm

100, 125, 150 & 200mm

100, 125, 150 & 200mm

200mm (only)

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

75, 100, 125, 150 & 200mm

75, 100, 125, 150 & 200mm

75, 100, 125, 150 & 200mm

100, 125, 150 & 200mm

100, 125, 150 & 200mm

100, 125, 150 & 200mm

100, 125, 150 & 200mm

100, 125, 150 & 200mm

150 & 200mm

100, 125, 150 & 200mm

If you are interested in any of the above processing services contact customer service at Process Specialties at 800.533.8820 for a quotation. If you do not see exactly the process you are looking for please contact us, as we cannot list all of our services here. If we do not offer your custom process, perhaps we can give you a referral to another qualified supplier.

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