Process Specialties has been providing reliable high quality wafer processing services to the Semiconductor, MEMS, Medical and Military/Aerospace industries since 1988.

After 23 years of successfully processing well over three million 100 - 200mm wafers, we continue to be a consistent and valuable resource for our client's confidential custom processing needs. Below you will find the normal processing we are offering, In addition we also process SOI, Quartz and SiGe wafers, as well as other substrates/objects. Please call PSI customer service to discuss your custom processing needs.

Processes                                              Specifications                                              Available Size(s)

DRY THERMAL OXIDE

THERMAL OXIDE

POLYSILICON DEPOSITION

LPCVD NITRIDE DEPOSITION

PETEOS OXIDE DEPOSITION

PVD PURE ALUMINUM

PVD ALUMINUM / Cu .5%

PVD TITANIUM (Ti)

PVD TITANIUM NITRIDE (TiN)

PVD TANTALUM (Ta)

PVD TANTALUM NITRIDE (TaN)

PVD COPPER (Cu)

PVD TUNGSTEN (W)

PVD CHROME (Cr)

WET CLEANING

WET PATTERNED ETCHING

PLASMA STRIPPING / ETCHING

WAFER RECYCLING

PHOTORESIST STRIPPING

PROXIMITY PHOTOLITHOGRAPHY

STEPPED PHOTOLITHOGRAPHY

PHOTORESIST COATING I-LINE

PHOTORESIST COATING DUV

PHOTORESIST COATING 193 nm

40 - 900Å

900 - 24,000Å

1000 - 30,000Å

200 - 3,000Å

500 - 30,000Å

1,000 - 20,000Å

1,000 - 20,000Å

200 - 3,000Å

200 - 3,000Å

200 - 3,000Å

200 - 3,000Å

200 - 20,000Å

200 - 4,000Å

200 - 2,000Å

RCA, SC1 - SC2, Dilute HF/DI cleaning

HF-BOE Oxide, Metal etching, etc.

POLY / NITRIDE  (5um+ Feature Etching)

STRIP FILMS/ OXIDE, POLY, METALS...

H2SO4 / H202 (PIRANHA), PLASMA

>4 MICRON PSI or CUSTOMER MASKS

>.5 MICRON PSI or CUSTOMER RETICLES

I LINE POSITIVE RESIST 1um - 3um 

DUV 248 nm POSITIVE RESIST 1um - 3um

DUV 193 nm POSITIVE RESIST .25 - .5um

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

75, 100, 125, 150 & 200mm

75, 100, 125, 150 & 200mm

200mm (only)

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

75, 100, 125, 150 & 200mm

75, 100, 125, 150 & 200mm

75, 100, 125, 150 & 200mm

100, 125, 150 & 200mm

100, 125, 150 & 200mm

100, 125, 150 & 200mm

100, 125, 150 & 200mm

100, 125, 150 & 200mm

200mm only

100, 125, 150 & 200mm

200mm only

200mm only

If you are interested in any of the above processing services contact customer service at Process Specialties at 800.533.8820 for a quotation. If you do not see exactly the process you are looking for please contact us, as we cannot list all of our services here. If we do not offer your custom process, perhaps we can give you a referral to another qualified supplier.

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