Process Specialties was the first company to offer 300mm processing services to Machine Tool and IC processing companies world wide, back in 1996. For the past 13 years we have been delivering quick turn times, and reliable high quality confidential processing services to our clients. In 2009 we continue to be a valuable resource for our clients R & D needs.

In 1997 Process Specialties developed the first production 300mm LPCVD Nitride and Poly Silicon systems. As of 2009 we have processed over 200,000 wafers through our Nitride and Poly Silicon systems. In total Process Specialties has successfully processed over one million 300mm wafers through various operations. When it comes to 300mm processing in the 21st century remember, that PSI is the most experienced and trusted private organization currently offering 300mm wafer processing services on the planet!

300mm Processes                                                             Specifications  

DRY THERMAL OXIDE  800-900°C

THERMAL OXIDE (H₂ O₂ Pyrogenic wet steam) Max 900°C

POLYSILICON DEPOSITION  610°C

LPCVD NITRIDE DEPOSITION  820°C

AMORPHOUS SILICON DEPOSITION  525°C

PVD PURE ALUMINUM

PVD ALUMINUM / Cu .5%

PVD TITANIUM (Ti)

PVD TITANIUM NITRIDE (TiN)

PVD TANTALUM (Ta)

PVD TANTALUM NITRIDE (TaN)

PVD COPPER (Cu)

PVD CHROME (Cr)

PVD TUNGSTEN (W)

WET CLEANING

WET PATTERNED ETCHING

WAFER RECYCLING / RECLAIM

PLASMA STRIPPING / ETCHING

PHOTORESIST STRIPPING

PROXIMITY PHOTOLITHOGRAPHY  (Full Wafer)

STEPPED PHOTOLITHOGRAPHY

BLANKET PHOTORESIST COATING  I-LINE / 248nm DUV

BLANKET 193 nm DUV PHOTORESIST COATING

35 - 900Å

900 - 24,000Å

1000 - 20,000Å

200 - 3,000Å

200 - 1500Å

1,000 - 20,000Å

1,000 - 20,000Å

200 - 3,000Å

200 - 3,000Å

200 - 3,000Å

200 - 3,000Å

200 - 20,000Å

200 - 2,000Å

200 - 2000Å

RCA, SC1 - SC2, Dilute HF Cleaning / Dipping

HF-BOE Oxide etch, Metal etch, KOH Silicon etch

STRIP FILMS / RECLAIM / POLISHING SERVICE

POLY / NITRIDE  (5um+ Feature Etching)

H₂SO₄ / H₂0₂ (PIRANHA), O₂ PLASMA

3 MICRON+ PSI or CUSTOMER SUPPLIED MASKS

.5 MICRON+ PSI or CUSTOMER SUPPLIED RETICLES

.8 um - 3.0 um Thickness

.45 um - .6 um Thickness

If you are interested in any of the above processing services contact Customer Service at 800.533.8820 for a quotation. If you do not see exactly the 300mm process you are looking for please contact us, as we cannot list all of our services here and we may offer what you need. If we do not offer your custom processing, we may be able to give you a referral to another qualified supplier.

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